Northwestern University Robert R. McCormick School of Engineering and Applied Science

Advanced Manufacturing Processes Laboratory

Metrology Instruments

Alicona Infinite focus-Optical 3D measurement & inspection

  • Non-contact, optical 3 dimensional, based on Focus-Variation

  • Surface profile form and roughness measurement

  • Surface topography Ra above 10-15 nm with a Lc of 2um, surface structure dependent

  • Minimum vertical repeatability less than 0.12 um

  • Best vertical resolution in the range of 10 to 410 nm

  • Fully automated and programmable xyz stages

  • Less than 400 um/sec scan speed

  • 5x, 20x, 50x and 100x objective

ZYGO NewViewTM 7300 Non-destructive 3D surface metrology tool

  • Surface height measurement from less than 1nm to 20 mm

  • Sub-nanometer resolution

  • Less than 0.01 nm RMS repeatability

  • Fully automated and programmable xyz stages

  • Less than 135 um/sec scan speed

  • 10x and 50x objectives

Cameras

High Speed Camera

  • Model: Photron FASTCAM  Mini UX 100

  • Resolution: 1280 x 1024

  • Max Frame Rate: 204,000 fps

  • Sensor Format: 12.80 (H) x 10.24mm (V) / 16.39mm (D)

  • Pixel Size: 10 µm

Infrared Camera

  • Model: FLIR A655sc

  • Resolution: 640 x 480

  • Frame Rate: 50 fps

  • Pixel Size: 17 µm

  • FOV Range: 250 - 1850 mm

  • Temperature Range: -40º to 3000º C

  • Temperature accuracy: ±2ºC

Infrared Camera

  • Model: Stratonics ThermaViz® melt pool sensor

  • IR sensor for melt pool history with two wave calibration

  • Resolution: 752 x 480

  • Frame Rate: 25 fps

  • Pixel Size: 6.45 µm

  • FOV Range: 5 - 500 mm

  • Temperature Range: 1000º to 2500ºC

Infrared Camera

Jenoptik High Resolution Infrared Camera

  • Thermal camera that can measure temperature in a range of -40°C~1200°C

  • Temperature resolution of 50mK

  • Measurement accuracy of ±1.5K

  • Spectral range is 7.5 μm

  • Can be operated under -15°C~50°C

Ultra-Fast Shutter Camera:

  • Model: PicoStar 12 System with advanced picosecond-delay unit

  • Delay-Unit Minimum Delay: 1 ps

  • Intensifier Gating Time: <300 ps

  • Max Frequency: 110MHz

  • Extinction Ratio: 1:2000

  • Sensitivity: Single photon

  • UV Spectral Sensitivity: 200 nm.

  • Pixel Size: 6.45 µm

  • Sensor Format: 2/3”