Advanced Manufacturing Processes Laboratory

Alicona Infinite focus-Optical 3D measurement & inspection

• Non-contact, optical 3 dimensional, based on Focus-Variation

• Surface profile form and roughness measurement

• Surface topography Ra above 10-15 nm with a Lc of 2um, surface structure dependent

• Minimum vertical repeatability less than 0.12 um

• Best vertical resolution in the range of 10 to 410 nm

• Fully automated and programmable xyz stages

• Less than 400 um/sec scan speed

• 5x, 20x, 50x and 100x objective

ZYGO NewViewTM 7300 Non-destructive 3D surface metrology tool

• Surface height measurement from less than 1nm to 20 mm

• Sub-nanometer resolution

• Less than 0.01 nm RMS repeatability

• Fully automated and programmable xyz stages

• Less than 135 um/sec scan speed

• 10x and 50x objectives